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Fundamentals of microfabrication and nanotechnology /

Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology Marc J. Madou. - 3rd ed. - Boca Raton, FL : CRC Press, 2012 - 636 p. : ill

HKBU library

YT2025 M08

ISBN: 9781420055160

Subjects--Topical Terms:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfluidics
Solid state physics.

LC Class. No.: TK7875 / M183 F 2012

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