Graff, Klaus, <br/><br/>
Metal impurities in silicon-device fabrication / 
Klaus Graff. 
 - New York :  Springer-Verlag,  1995. 
 - ix, 216 p. :  ill. 
 - Springer series in materials science ;  24 .
<br/><br/>HKBU library 
<br/><br/> YT2025 M08 
<br/><br/><label>ISBN: </label>0387583173 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Defects.<br/>Silicon--Inclusions.<br/>Silicon--Defects.<br/>Contamination (Technology)
<br/><br/><label>LC Class. No.: </label>TK7871.85  / G736 M 1995