Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology /  
 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology 
Marc J. Madou. 
 - 3rd ed. 
 - Boca Raton, FL :  CRC Press,    2012 
 - 636 p. :  ill 
<br/><br/>HKBU library 
<br/><br/> YT2025 M08 
<br/><br/><label>ISBN: </label>9781420055160 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/> Nanoelectromechanical systems.<br/>Microfluidics<br/> Solid state physics.
<br/><br/><label>LC Class. No.: </label>TK7875   / M183 F 2012