00817nam a22002417a 4500 250808b2012 flua|||| |||| 00| 0 eng d 9781420055160 TK7875 M183 F 2012 Madou, Marc J. 202024 Fundamentals of microfabrication and nanotechnology / Marc J. Madou. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology 3rd ed. Boca Raton, FL : CRC Press, 2012 636 p. : ill HKBU library YT2025 M08 Microelectromechanical systems. 202025 Nanoelectromechanical systems. 202026 Microfluidics 193883 Solid state physics. 202027 = C.1 SDIU lcc GBE 106378 106378 0 0 lcc 0 TK7875 M183 F2012 0 CGB 277874 SDU SDU GEN3 2025-08-08 0 TK7875 M183 F 2012 1000365470 2025-08-08 00:00:00 C.1 2025-08-08 GBE