Fundamentals of microfabrication and nanotechnology
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Madou, Marc J.
creator
text
flu
Boca Raton, FL
CRC Press
2012
3rd ed.
monographic
eng
636 p. : ill
HKBU library
Marc J. Madou.
YT2025 M08
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics
TK7875 M183 F 2012
9781420055160
250808