TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology / 
SN  - 9781420055160
AV  - TK7875  M183 F 2012
PY  - 2012///
CY  -  Boca Raton, FL
PB  - CRC Press,  
KW  - Microelectromechanical systems
KW  -  Nanoelectromechanical systems
KW  - Microfluidics
KW  -  Solid state physics
N1  - HKBU library; YT2025 M08
ER  -