00988nam a22002537a 4500008004100000020001800041050002500059100002700084245007500111246009000186250001200276260004200288300001800330505001700348518001500365650004400380650004400424650002600468650003400494900001500528942001300543999001900556952015900575250808b2012    flua|||| |||| 00| 0 eng d  a978142005516000aTK7875 bM183 F 20121 aMadou, Marc J.920202410aFundamentals of microfabrication and nanotechnology / cMarc J. Madou.30aSolid-state physics, fluidics, and analytical techniques in micro- and nanotechnology  a3rd ed.  a Boca Raton, FL :bCRC Press,  c2012  a636 p. :bill  aHKBU library  aYT2025 M08 0aMicroelectromechanical systems.9202025 0a Nanoelectromechanical systems.9202026 0aMicrofluidics9193883 0a Solid state physics.9202027  a= C.1 SDIU  2lcccGBE  c106378d106378  00102lcc406TK7875 M183 F2012708CGB9277874aSDUbSDUcGEN3d2025-08-08l0oTK7875  M183 F 2012p1000365470r2025-08-08 00:00:00tC.1w2025-08-08yGBE