Menz, Wolfgang <br/><br/>
Microsystems Technology / 
Wolfgang Menz, Jurgen Mohr, Oliver Paul 
 - Weinheim :  Wiley-VCH,  2001 
 - 500 p. :  ill 
<br/><br/><label>ISBN: </label>3527296344 /  8,880.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology<br/>Engineering
<br/><br/><label>LC Class. No.: </label>T45  / M551 M5 2001