| 000 | 00753pam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 940907s1995 gw a b 001 0 eng | ||
| 020 | _a0387583173 | ||
| 040 | _aSDU | ||
| 050 | 0 | 0 |
_aTK7871.85 _bG736 M 1995 |
| 100 | 1 |
_aGraff, Klaus, _9194612 |
|
| 245 | 1 | 0 |
_aMetal impurities in silicon-device fabrication / _cKlaus Graff. |
| 260 |
_aNew York : _bSpringer-Verlag, _c1995. |
||
| 300 |
_aix, 216 p. : _bill. |
||
| 490 | 1 |
_aSpringer series in materials science ; _v24 |
|
| 505 | _aHKBU library | ||
| 518 | _aYT2025 M08 | ||
| 650 | 0 |
_aSemiconductors _xDefects. _9194613 |
|
| 650 | 0 |
_aSilicon _xInclusions. _9194614 |
|
| 650 | 0 |
_aSilicon _xDefects. _9194615 |
|
| 650 | 0 |
_aContamination (Technology) _9194616 |
|
| 900 | _a= C.1 SDU | ||
| 942 |
_cGBE _2lcc |
||
| 999 |
_c104385 _d104385 |
||