000 00753pam a2200241 a 4500
008 940907s1995 gw a b 001 0 eng
020 _a0387583173
040 _aSDU
050 0 0 _aTK7871.85
_bG736 M 1995
100 1 _aGraff, Klaus,
_9194612
245 1 0 _aMetal impurities in silicon-device fabrication /
_cKlaus Graff.
260 _aNew York :
_bSpringer-Verlag,
_c1995.
300 _aix, 216 p. :
_bill.
490 1 _aSpringer series in materials science ;
_v24
505 _aHKBU library
518 _aYT2025 M08
650 0 _aSemiconductors
_xDefects.
_9194613
650 0 _aSilicon
_xInclusions.
_9194614
650 0 _aSilicon
_xDefects.
_9194615
650 0 _aContamination (Technology)
_9194616
900 _a= C.1 SDU
942 _cGBE
_2lcc
999 _c104385
_d104385