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Metal impurities in silicon-device fabrication /

Graff, Klaus,

Metal impurities in silicon-device fabrication / Klaus Graff. - New York : Springer-Verlag, 1995. - ix, 216 p. : ill. - Springer series in materials science ; 24 .

HKBU library

YT2025 M08

ISBN: 0387583173

Subjects--Topical Terms:
Semiconductors--Defects.
Silicon--Inclusions.
Silicon--Defects.
Contamination (Technology)

LC Class. No.: TK7871.85 / G736 M 1995

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Metal impurities in silicon-device fabrication /

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