AI SearchMetal impurities in silicon-device fabrication / (Record no. 104385)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00753pam a2200241 a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 940907s1995 gw a b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0387583173 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | SDU |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | G736 M 1995 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Graff, Klaus, |
| 245 10 - TITLE STATEMENT | |
| Title | Metal impurities in silicon-device fabrication / |
| Statement of responsibility, etc. | Klaus Graff. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Springer-Verlag, |
| Date of publication, distribution, etc. | 1995. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 216 p. : |
| Other physical details | ill. |
| 490 1# - SERIES STATEMENT | |
| Series Statement | Springer series in materials science ; |
| Volume/sequential designation | 24 |
| 505 ## - Formatted Contents Note | |
| Formatted contents note | HKBU library |
| 518 ## - DATE/TIME AND PLACE OF AN EVENT NOTE | |
| DATE/TIME AND PLACE OF AN EVENT NOTE | YT2025 M08 |
| 650 #0 - SUBJECT | |
| Topical term | Semiconductors |
| General subdivision | Defects. |
| 650 #0 - SUBJECT | |
| Topical term | Silicon |
| General subdivision | Inclusions. |
| 650 #0 - SUBJECT | |
| Topical term | Silicon |
| General subdivision | Defects. |
| 650 #0 - SUBJECT | |
| Topical term | Contamination (Technology) |
| 900 ## - Accession Number | |
| Accession Number | = C.1 SDU |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | English Books |
| Source of classification or shelving scheme | Library of Congress Classification |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| -- | 194612 |
| 650 #0 - SUBJECT | |
| -- | 194613 |
| 650 #0 - SUBJECT | |
| -- | 194614 |
| 650 #0 - SUBJECT | |
| -- | 194615 |
| 650 #0 - SUBJECT | |
| -- | 194616 |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Available for Loans | General Books | MATRIX Library | MATRIX Library | General Eng/FL.3 | 05/08/2025 | Donation | TK7871.85 G736 M 1995 | 1000365806 | 05/08/2025 | C.1 | 05/08/2025 | English Books |