Fundamentals of microfabrication and nanotechnology / Marc J. Madou.

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TextPublication details: Boca Raton, FL : CRC Press, 2012Edition: 3rd edDescription: 636 p. : illISBN:

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Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology

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HKBU library

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English Books

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Holdings
Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	English Books	MATRIX Library General Eng/FL.3		General Books		TK7875 M183 F 2012 (Browse shelf(Opens below))				C.1	Available			1000365470

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HKBU library

YT2025 M08

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